Analysis of Controlled Staircase Comb Actuator using Different Structural Materials

Abstract: Staircase comb geometry using different materials are analysed. PTFE is also a type of polymer which produces maximum displacement of 3.6 �m at low voltage 3.5 V as compared to Poly silicon which produces same displacement at 62.1 V, 0.1V to 1.1V, then a Sharpe change in voltage occur between 1.1 to 2.3 V and then again a second slow movement of nearly 0.8 �m takes place between 2.3 to 3.5 V.

Keywords: Comb Drive, FEM, Actuator, Electrostatic