Abstract: The miniaturization of existing technology has been on the forefront of development, optimization—both of function and cost—and advancement of electro-mechanical systems. The need to develop smaller, more cost and energy efficient electronics with a more varied portfolio of applications will lead to the continued creation of complex MEMS devices. The creation of MEMS microphones is an example of the necessity of packaging the function of existing larger recording equipment into objects such as cell phones, hearing aids, and other complex devices. Due to the minuscule nature of these systems, placing them into an array allows for the same amount of data acquisition as their larger counterparts in a similar array, but in a much smaller footprint. This paper discusses some of the current uses of MEMS microphones, their manufacture and the mathematics necessary to quantify and utilize their function. That information was utilized to develop a simulation of a MEMS microphone using the COMSOL software. Lastly, a physical demonstration was developed to offer a proof of concept for a larger array in the function of object detection.
Keywords: MEMS, 2D, 3D, piezoelectric, capacitive, COMSOL, diaphragm, Active noise cancelling, UAV, SOG, ASIC, SNR, I2S
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DOI:
10.17148/IJARCCE.2022.115129
