Simulation and Analysis of MEMS Energy Harvesting Device and Effect of Substrate Thickness on Power Density

Abstract: Energy harvesting; that is, harvesting small amounts of energy from environmental sources such as solar, air flow or vibrations using small-scale (≈1cm3) devices, offers the prospect of powering portable electronic devices. Numerous studies have shown that power densities of energy harvesting devices can be hundreds of μW; however, the literature also reveals that power requirements of many electronic devices are in the mW range. In this research paper simulation of MEMS based energy harvesting and effect of piezoelectric thinfilm in carried to evaluate the efficiency and power density of the device.

Keywords: MEMS, piezoelectric, thickness, thinfilm.